PS520 Ceramic capacitive vacuum pressure sensor
Data Download
Product Applications
1.Semiconductor and integrated circuit manufacturing
Application scenarios
Dry Etching, chemical vapor deposition (CVD), and physical vapor deposition (PVD) : The precise vacuum degree within the reaction chamber is the key to process repeatability and consistency.
Ion Implantation: Monitor the ultra-high vacuum environment during the implantation process.
2. Medical and Biotechnology
Application scenarios
Anesthesia machine/ventilator: It precisely monitors the gas pressure and flow in the patient's airway, which is directly related to life safety.
Blood analyzers, in vitro diagnostic (IVD) equipment: Control the precise flow and distribution of samples, reagents and cleaning solutions.
Sterilization equipment (autoclave) : Monitor the pressure and vacuum degree during the sterilization process to ensure the sterilization effect.
Drug delivery pumps (such as insulin pumps) : Precisely control the micro-delivery of liquid medicine.
3. Scientific instruments and analytical equipment
Application scenarios
Electron scanning microscope (SEM), transmission electron microscope (TEM) : Maintain high vacuum in the tube and sample chamber.
Mass Spectrometer: It is used in gas chromatography-mass spectrometry (GC-MS) and other methods to monitor the vacuum degree of the ion source and analyzer.
Vacuum coating machine: used for scientific research or the preparation of optical components.
4. Industrial Automation and Process Control
Application scenarios
Chemical Engineering and Petrochemicals: Measuring the liquid level, flow rate and pressure of corrosive chemicals (acids, alkalis, solvents).
Food and Beverage: Used in CIP (In-place Cleaning) systems, resistant to high temperatures, high pressures and corrosive cleaning agents.
Electricity and Energy: Monitor the combustion chamber pressure or flue gas pressure of boilers and gas turbines.
5. Automobiles and Aerospace
Application scenarios
Automobile: Engine manifold absolute pressure (MAP) sensor, fuel evaporation control system, brake assist vacuum monitoring.
Aerospace: Aircraft cockpit pressure control systems, engine intake pressure monitoring, fuel system pressure monitoring.
6. Environmental monitoring and vacuum equipment
Application scenarios
Environmental monitoring station: It is used for atmospheric pressure monitoring. Its high stability ensures the reliability of long-term data.
Vacuum freeze dryer (freeze dryer) : Used in the pharmaceutical and food industries, it precisely controls the vacuum degree during the drying process.
Vacuum furnace: used in metallurgy and material heat treatment.
technical parameters
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Parameter
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Specification
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Supply voltage
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12... 30Vdc
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No-load current consumption
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Maximum 40mA, powered by 24Vdc
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Switch output - Output type
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2-channel PNP/NPN switchable, normally open/normally closed adjustable
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Switch output - Switching load
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<200mA /24VDC
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Switch output - Response time
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0.01 to 2 seconds (factory default)
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Switch output - Switch accuracy
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≤±0.25% range
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Switch output - Current-type analog output
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≤±0.25% range
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Current-type analog output - Output type
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4-20mA/0-10v/1-5v can be set
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Current-type analog output - Load RA
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≤500Ω
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Current-type analog output - Linearity
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≤0.5% range
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Communication output
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IO-Link/RS485 is optional
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Wiring protection
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Reverse phase, overload, short circuit protection
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Display - Design
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Red 4-digit 12mm high-brightness LED
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Display - Display range
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-1999... 9999
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Display - Accuracy
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≤±0.25% range
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Stability (annual drift)
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≤±0.3% range
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Temperature - Medium temperature
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-20... 85°C
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Temperature - Ambient temperature
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-20... 80°C
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Temperature - Storage temperature
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-30... 80°C
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Materials - Meter head housing
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Engineering plastic
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Materials - Flame retardant grade
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UL-94 V-0
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Materials - Shell
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Stainless steel 304
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Materials - Medium contact part
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Stainless steel 304/ ceramic AI2O3 (purity 99.9%)
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Protection grade
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IP67
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Cable exit method
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M12x1 connector
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